Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device
نویسندگان
چکیده
In this study, the prototype of a thermal roller imprint lithography (RIL) system was developed and applied to RIL tests to evaluate its feasibility for the large area replication of an optical micro device. The developed system adapts an automatic stamp releasing mechanism and has the capacity to replicate ultra-precision structures on an area of 100mm×100mm at the scanning speed range of 0.1–10mm/s. For RIL tests, 1mm-thick polyethylene terephthalate (PET) plastic plates and 100 m-thick cycloolefin resin filmswere used as imprint materials. All samples were 100mm×100mm in size. The combination of a thin and flexible polymer filmand an elastomeric adhesive sheetwas effective for both rapid processing and uniform replication. For given RIL conditions (700N press force and Tg + 50 ◦C roller temperature), the complete filling for a 1mm-thick PET sample was achieved at the
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